Quantitative chemical state XPS analysis of first row transition metals, oxides and hydroxides

Biesinger, Mark C.1; Payne, Brad P.1; Hart, Brian R.1; Grosvenor, Andrew P.1; Smart, Roger St.C.2; McIntyre, N. Stewart1; Lau, Leo W.M.1 1Canada; 2Australia

Practical quantitative X-ray photoelectron spectroscopy (XPS) analysis of first row transition metals, oxides and hydroxides is challenging due to the complexity of their M 2p spectra. Complex multiplet splitting, shake-up and plasmon loss structure can play a role in the interpretation of the chemical states present. Some of the downfalls of the literature for each element of interest in this area will be discussed. This paper will then show in detail practical curve fitting procedures for the quantitative measurement of different chemical states for metal oxides and hydroxides of chromium, manganese, iron, nickel and copper. It will also discuss some of the limitations and pitfalls present as well as give practical examples of their successful use. These curve fitting procedures are based on standard spectra taken over the course of number of years on a state-of-the-art Kratos Axis Ultra XPS spectrometer. This paper will summarize previously published data as well as newly developed fitting procedures.

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