Frictional property of TiBN thin films prepared by combinatorial sputter coating
Goto, Masahiro; Xu, Yibin; Kasahara, Akira; Tosa, Masahiro Japan
Thin films of TiBN on stainless steel substrates were prepared by newly developed combinatorial sputter coating system (COSCOS). Crystal structure of the prepared films was analyzed with X-ray diffraction spectroscopy (XRD). Surface topographical images of the films were observed by atomic force microscopy (AFM). Frictional properties of the films were measured by a pin on plate and pin on disc type tribometers at an atmospheric pressure. Mixture of nitrogen and argon gases was used with different mixture ratios as a sputter gas. It was found that the peak of the BN crystal domains changed with the mixture ratio of the nitrogen gas in a sputter gas. The friction coefficients also changed with the amount of the BN crystal domains.