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The spatial variation of the eletron energy distribution function (EEDF) and plasma parameters in a planar dc magnetron sputtering discharge were determined using a Langmuir probe. The target was made of copper and the sputtering gas was argon and kypton in the pressure range 3 - 15 mTorr. The electron energy distribution function is bi-Maxwellian. For argon discharge the cold electron group has electron temperature in the range 0.7 - 1.1 eV while the hotter electrons have electron temperature in the range 2 - 3 eV. For krypton discharge the cold electron group has electron temperature in the range 0.5 - 0.9 eV while the hotter electrons have electron temperature in the range 1 - 2 eV. The electron density is in the range 1016- 1017 m-3 . |