The Korea Research Institute of Standards and Science (KRISS) was established in 1975 as the central authority of the national measurement system in Korea. Three major standard systems, an ultrasonic interferometer manometer (UIM), static expansion system (SES), and an orifice-type dynamic expansion system (DES) with a porous plug have been established at KRISS, in the pressure range 10? Pa to 105 Pa, since 1985.
The difference height due to the difference in pressure between the mercury columns of the UIM is measured using ultrasonic interferometer. The basic principle of the SES is adopted Boyle’s law. The UHV calibration system is basically a two-stage flow divider system. It consists of two dynamic calibration systems: one for high vacuum, pressure is Pa, and the other for ultra-high vacuum, pressure is Pa, which is connected to the HV system by a porous plug having a very small conductance.
The performance evaluation systems for vacuum pumps, vacuum gauges, vacuum components, vacuum materials, plasma diagnosis had been developed. And also proper testing procedures for specific 72 vacuum related testing items had been developed. Using these systems and techniques, several hundreds technical data reports per year had been supplied to industries or laboratories. We will present of present research activities and future plan at the KRISS vacuum center.
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