Envelopes method of reflection and transmission spectra under a multibeam interference for two-film structures parameters measurement.
Kosobutskyy, Petro; Kushnir, Oleg
Ukraine

In the present work the analytical expressions of reflection and transmission spectra envelopes of two-film structures for the first time are obtained. The obtained expressions have the general character and are applicable for transparent and absorbing films, at normal and oblique transmission of light through structure. Therefore, the decision of such problem is of great importance for an effective method elaboration of a parameters monitoring without destruction in thin-film epitaxial technology since structures of type: single film on a surface of a substrate of the certain thickness are widely used.
It is established, that as distinct from the one-film structure, envelopes of two-film oscillate and for them also it is possible to put in envelopes. For them the analytical expressions also are established. The oscillation period of the envelope is equal appropriate for separately considered reflection spectrum of light from the second film. It is shown also, that at Brewster angles for single interfaces profiles of reflection and envelopes meet.
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