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This paper discusses the application of DLC(Diamond-like Carbon) film deposition on stainless steel substrate for the surface property modification. A Ti/TiN/TiC underlayer with functional gradient was pre-deposited on the substrate to play a role of transition interlayer so as to improve the adhesion strength. Then, the DLC film with a certain thickness was thus deposited successfully on the substrate without delamination. Optimizing the deposition parameters, the friction coefficient and the wear rate between DLC film deposited and 100Cr6 steel ball can be lower than 0.2 and 1.07×10-12 mm3/Nm, respectively. The self-lubricate and wear-off mechanism of DLC film in the frictional process was studied by means of SEM and Raman microanalysis. |