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The porous silicon (PS) based gas sensors are known for their advantages like good sensitivity to several gases due to their large internal surface, reversibility, low cost, compactness and integration in silicon technologies. In this work, we design a PS based gas sensing device in which the magnetic parameter is introduced. We utilize the electric isolation of the PS to realize a planar inductor directly on the sensing device. The response for different gases (hydrocarbons, oxygen, CO2 ) has been investigated. The results show that the induced voltage varies with both concentration and nature of gas. |