The two microscopy methods transmission electron microscopy (TEM) and scanning probe microscopy (SPM) are of outmost importance in all aspects of nanoscience. TEM is used for determination of microstructures while the SPMs provide topography of surfaces and local measurements. In a new method, called TEM in situ probing or alternatively TEM-SPM, the two microscopes are combined, where the TEM is used in the standard way to image the samples and the SPM is used for local probing of electrical and mechanical properties. The advantage of this method is the ability to make in situ probing while imaging at high resolution using the TEM. For example, in the SPM the shape of tip and sample, tip-sample distance or radius are unknown, which is hampering interpretation of local measurements, but directly visible in the in situ method. An important aspect is the dynamic nature of the experiments where movies with correlated probing data are providing the appropriate data format.
Here we review the instrumental aspects such as a side-entry TEM holder incorporating a tiny SPM [1,2] as well as give examples of specially designed probes for nanoindendation [3] and AFM. We present some recent examples of applications such as point contacts, adhesion, electromigration [4], nanorelays [5] and nanowires. We also discuss possible extensions of in situ probing.
[1] K. Svensson, Y. Jompol, H. Olin, and E. Olsson, A compact design of a TEM-STM holder with 3-dimensional coarse motion, Rev. Sci. Instr. 74 (2003) 4945
[2] Nanofactory Instruments (www.nanofactory.com)
[3] A. Nafari, P. Enoksson, H. Olin, A.Danilov, and H. Rodjegard, A micromachined nanoindentation force sensor, Sensors and Actuators A 123 (2005) 44
[4] K. Svensson, H. Olin, and E. Olsson, Nanopipettes for metal transport, Phys. Rev. Lett. 93 (2004) 1459
[5] K.J. Ziegler, D.M. Lyons, J.D Holmes, D. Erts, B. Polyakov, H.Olin, K. Svensson and E. Olsson, Bistable nanoelectromechanical devices,?Appl. Phys. Lett. 84 (2004) 407
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