The aim of the present work is to determine the regularities of oriented crystallization for thin films of the alloy Cu + 47 at. % Pd.
The films of the solid solution Cu-Pd ~ 0,1 ìm in thicreness were grown by the method of magnetron sputtering of the alloyed target Cu + 47 at. % Pd in an argon atmosphere (1•10-1 Pa). The films were deposited on the fluorphlogopite plates at a rate of 10 nm•s-1 in the substrate temperature range (Ts) of 300 - 970 K. The investigations were made in the electronograph EG - 100 M and the transmission electron microscope EM 125.
At Ts ~ 300 K a homogeneous solid solution with fcc lattice is formed. The grain size is ~ 20 nm, with no signs of preferred orientation.
The increase of Ts to 700 K leads to the formation of single-phase structures (β-phase).
The single-axis textures (the strong <111>β and the weak <001>β) are formed. The film micro-structure is characterized by the alternation of the regions of different textures with the grain size of ~ 50 nm.
At Ts = 800 K the multiorientational epitaxial structures of β-phase with a small amount of α-phase are formed. The β-phase is characterized by the three preferred azimuthal orientations with the (001)β plane parallel to the basal plane of the fluorphlogopite (F):
(001),[110] β || (001), [001], [-3,-1,0], F (1)
The grain size is ~ 0,1 - 1 µm. The reflexes in the rigs of the α-phase correspond to the orientation relationships:
(001),<110> α || (001), <110> β (2)
At Ts = 870 - 920 K the films contained both the mixed regions of α and β-phase, and the α-phase regions of (111) orientation.
At Ts = 970 - 1000 K the epitaxial single-orientational films of β-phase in (111) orientation were grown.
Thus, the temperature ranges for the obtaining the epitaxial films of the ordered solid solution Pd-Cu (β-phase with the lattice of CsCl) have been determined.
The orientation relation ships realizing during the oriented growth of the β-phase films have been reveled.
In the epitaxial two-phase films of the solid solution Pd-Cu the crystals of the β-phase are in the orientation relationships of Nishiyama-Wassermann and Kurdjumov-Sacks relative α-phase.
The work was performed under the grant of the President of Russian Federation "Support of the Leading Scientific Schools", No. SS-7098.2006.3.
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