Co-sputtered magnesium (Mg) and carbon (C) is expected to contain nano-sized magnesium clusters embedded in a carbon network. This approach has, for instance shown to affect the binding energy of hydrogen in Mg [1]. Here we present the experimental work on the growth and structural properties of Mg:C thin films, grown in a dc magnetron sputtering discharge. The electrical resistance was monitored, both during layered and co-sputtered deposition, with varying carbon content (15-45%). The structural properties of the films were investigated using X-ray measurements and the surface topology with atomic force microscope, AFM measurements. From X-ray diffraction measurements, it was concluded that the films were X-ray amorphous independent of the carbon content in the films. The composition of the films was determined using elastic recoil detection analysis (ERDA) and related to the electrical resistance measurements during growth. The stability of the film was found to depend on the power applied on the carbon target.
[1] A. S. Ingason accepted for publication (2007). |