Falcony, Ciro; Carmona, Salvador; Garcia-Hipolito, Manuel Mexico
LaxAl2-xO3 films with x≤1 have been deposited by ultrasonic spray pyrolysis technique using aluminum and lanthanum acetylacetonates as reactants dissolved in dimethil-formamide on silicon substrates. The incorporation of La in the film depends on the relative content of the lanthanum salt in the spraying solution as well as on the deposition temperature. The deposition temperatures were in the range of 500 to 700 °C. The refractive index and morphological characteristics of the films were also studied as a function of the deposition parameters.