Nanocomposite films of metals or metal-oxides with polymer matrix are very promising materials for applications in advanced electronic, optical and mechanical devices. They can have interesting electrical and optical properties. In this paper we studied the deposition and basic properties of nanocomposite Sn/plasma polymer films. Composite Sn/hydrocarbon plasma polymer films were deposited by means of balanced magnetron operating in a gas mixture of argon and n-hexane.
We studied the effect of various deposition parameters as pressure, gas mixture ratio and power on the film properties. The surface topography and roughness were measured by the Atomic Force Microscopy (AFM) system Metris 2001 A-NC Burleigh, Instruments, Inc. The composition of films was studied by Secondary Ion Mass Spectrometer (SIMS) ATOMIKA 3000 and X-ray Photoemission Spectrometer (XPS) based on SPECS components. Thickness measurements were done with the surfometer Planer Industrial SF2000. The film thickness of composite films was found roughly 100 nm. Surface wettability was determined by measuring the water contact angles. The static water contact angles were measured using the droplet method. The values of the water contact angles measured on the surface of the nanocomposite films were found to be 90° to 100°. The absorption spectra of thin nanocomposite films deposited on glass in the visible region were studied. We also measured electrical properties. Results of XPS measurements show atomic concentration of C from 89 to 91 %, O from 8 to 10% and Sn about 1% that stays like that through the cross section of the film (SIMS depth profile). C1s peak does not show any sign of carbon oxidation and therefore the oxygen is probably bonded as OH (water) that is incorporated in the films. This must be confirmed by FTIR and RBS/ERDA measurements that are in progress. Higher concentrations of Sn in nanocomposite films will be prepared.
This work was supported by The Ministry of Education of the Czech Republic (Project COST OC 143) and by AS CR (Project KAN 1011 20701).
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