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We have developed an absolute Auger electron spectroscopy by using a novel cylindrical mirror electron energy analyzer(CMA) which is almost calculable. The calculable property is the essence of the system and close to the SI system. The spectra already obtained for some typical pure samples are available through Internet of "http://www.sasj.jp/compro" and have been used among scientists and engineers. With more rigid definition, another data base is now performed in the AIST as one of the project of RIIF(Research Institute of Instrumentation Frontier). As in the former data base, the primary electron acceleration voltage‚“ being traceable to the SI are 1V through 5000V and the whole energy spectra can be absolutely obtained by electrometer(SI traceable) and shown in one continuous one for the voltage. The transmission of the CMA was determined beforehand by using a mini-electron-gun at the sample position as a virtual sample. Two Faraday cups were used before the entrance and after the exit (normal signal detector) of the CMA, respectively. The ratio of the each current gave the transmission. A ball pointed tungsten hairpin cathode was employed. The energy of spectra was related to the precision voltage system (SI compatible) with thermionic emission of the primary electrons. The property of the thermionic emission was carefully observed in spectral shape as a function of the Wehnelt bias and the deformation of the spectra was also simulated by PC. The work function correction can be possible with an elaborated structure around the sample by applying a sample bias. This work is a collaboration of AIST, Nagoya Institute of Technology, and Osaka Institute of Technology.
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