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Bioelectronic sensor devices are interesting due to their potential for toxicological testing, pharmacological studies and medical diagnostics. This has raised the question, if living cells may be grown on microstructured surfaces. The geometrical surface structure is suspected to to influence cell growth For this purpose we have used a cryostatic process at -108°C for plasma etching of trenches. Various designs of trenches and mesas have been fabricated by regular microfabrication methods. Trench width was varied between 6 and 60 micrometers and trench depths down to 40 nm were realized by dry etching. Caco-2cells were seeded on top of the microstructured surfaces as suspension in a nurturing medium. The influence of the surface microstructure on cell growth was investigated by optical inspection after different periods of cell growth. The effects of the microstructure on the cell growth rate wereo investigated with a metabolic indicator.
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