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TiN coating has been widely applied to the surface treatment of the vacuum chambers of particle accelerator¡¯s storage ring because of its characters such as good electrical conductivity, stable performance, blocking the permeation of hydrogen diffusion, low SEY effect. In our experiment, with DC sputtering TiN film has been coated on the inner face of a stainless steel pipe vacuum chamber which is 86 mm in diameter and 2300 mm in length. The vacuum performances testing of the coated chamber has also been done, including thermal outgassing rate measurement, PSD measurement, and SEY measurement of samples. Compared with the same tests of stainless steel chamber, the results show that coating TiN film is a very effective means for the treatment of particle accelerator¡¯s vacuum chamber. |