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Now in vacuum technology they use many different types of residual pressure sensors, nevertheless, till now day there is not sensor type, which may be used for residual pressure measurement in wide range (105 -10-10 Pa) and for the surface coverage coefficient measurement simultaneously. The presented sensor may be used for these tasks decision and it is based on the friction coefficient functional dependence of residual pressure also as of coverage coefficient [1]. The patented [2] idea of new vacuum sensor was born as a result of so called dry friction¡ researches [3]. The experiments show that mentioned functional dependence exists for metal-metal friction pairs, for dielectric-dielectric friction pairs [3] also as for ball bearing work in vacuum [4]. It was theoretically shown that the main parameter of dry friction is a coverage coefficient, which consists mainly of sorbed water. We consider that the dry friction process is a complex process, which consists of some different components: 1-capillary component acts in low and middle vacuum (at summarized coverage more 2). Viscose component acts in low, middle and in high vacuum (at summarized coverage less 2),2-ahesive component acts in high and ultra high vacuum (at 2 > CH ), 3-cohesive component acts in extremely high vacuum (at CH).
The results, which were received by different authors at different conditions of the experiments (P, T, RH) are very close one to another ones, being presented as a functions of coverage coefficient and it support our idea about the unity of different friction results.
All mentioned results show the possibility to create the new vacuum sensor for residual pressure and coverage coefficient measurement simultaneously.
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